Instruments for UV Process Monitoring

Ultraviolet (UV) radiation measurements historically have been restricted to the
laboratory because of the bulky, awkward equipment required. With the increase in
popularity and utilization of UV radiation in industry, some significant new developments
have occurred in the area of UV process measurement and control. This paper
describes two of these developments and their basic principles of operation. These
developments are:

• High Energy Integrating UV, Radiometer
• UV Energy Mapping Device